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Elucidating Cu-Glycine and BTA Complexations in Cu-CMP Using SIMS and XPS

Authors :
M. Klimov
Sameer Deshpande
Sudipta Seal
Suresh C. Kuiry
Source :
Electrochemical and Solid-State Letters. 8:G98
Publication Year :
2005
Publisher :
The Electrochemical Society, 2005.

Subjects

Subjects :
Materials science
X-ray photoelectron spectroscopy
General Chemical Engineering
Glycine
Electrochemistry
General Materials Science
Electrical and Electronic Engineering
Physical and Theoretical Chemistry
Nuclear chemistry

Details

ISSN :
10990062
Volume :
8
Database :
OpenAIRE
Journal :
Electrochemical and Solid-State Letters
Accession number :
edsair.doi...........6f4d4e8db6150839b9c3c08441a52ae1

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