Phase Composition of Ultra-Fine Grain Titanium After Aluminum Ion Implantation

The paper investigates commercially pure titanium VT1-0 (US analog Grade 2) in the ultrafine grain state after the aluminum ion implantation at a fluence of 1∙1017, 5∙1017 and 10∙1017 ion/cm2. The investigation techniques include X-ray diffraction analysis, scanning electron microscopy with energy dispersive X-ray analysis, and transmission electron microscopy. Auger electron spectrometer is used to analyze the chemical composition of the implanted layer. The grain size in the longitudinal and transverse directions and the phase composition of ultrafine titanium are studied depending on the irradiation exposure. It is found that the ion implantation leads to the formation of such intermetallic compounds as Al3Ti and AlTi3 phases, β-phase titanium and aluminum oxide (Al2O3). The increased irradiation exposure results in the formation of a thicker implanted layer without changing its phase composition.