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Investigating Nanowire, Nanosheet and Forksheet FET Hot-Carrier Reliability via TCAD Simulations: Invited Paper

Authors :
Michiel Vandemaele
Ben Kaczer
Erik Bury
Jacopo Franco
Adrian Chasin
Alexander Makarov
Hans Mertens
Geert Hellings
Guido Groeseneken
Source :
2023 IEEE International Reliability Physics Symposium (IRPS).
Publication Year :
2023
Publisher :
IEEE, 2023.

Details

Database :
OpenAIRE
Journal :
2023 IEEE International Reliability Physics Symposium (IRPS)
Accession number :
edsair.doi...........6e9e103b75b87d8398d643fd14ea1061

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