Monte Carlo simulation of the electron beam scattering under water vapor environment at low energy

This paper reports on Monte Carlo simulations of electrons propagation in water vapor using a set of electron collision cross sections created with data published recently in order to follow the beam profile at low energy in environmental scanning electron microscopy (ESEM). Results show that lowering electrons beam energy or pressure has little effect on the skirt extend which is mainly function of working distance. The ionization and excitation events per track history are independent of the initial electron energy in the 1–5 keV range. Ionization occurs with low energy electrons, frequently above 50 eV, whereas the excitation processes are dominated by the electrons below 50 eV.