MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms

We have demonstrated high resolution focused ion beams based on a magneto‐optical trap ion source (MOTIS), which takes advantage of the ultra cold temperatures of laser cooled atoms to produce high brightness, low emittance ion beams. We have created focused beams of both Cr+ and Li+ and present secondary electron micrographs obtained with these beams, demonstrating a focal spot size as low as 27 nm at a beam energy of 2 keV. This work shows that the MOTIS can be a useful source for focused ion beams that will open new opportunities for applications in materials characterization and metrology.