A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500��C in Air

MLA

Benbrook, Savannah R., et al. A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500��C in Air. Jan. 2019. EBSCOhost, https://doi.org/10.48550/arxiv.1911.10276.

APA

Benbrook, S. R., Chapin, C. A., Lu, R., Yang, Y., Gong, S., & Senesky, D. G. (2019). A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500��C in Air. https://doi.org/10.48550/arxiv.1911.10276

Chicago

Benbrook, Savannah R., Caitlin A. Chapin, Ruochen Lu, Yansong Yang, Songbin Gong, and Debbie G. Senesky. 2019. “A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500��C in Air,” January. doi:10.48550/arxiv.1911.10276.