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A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500��C in Air
- Publication Year :
- 2019
- Publisher :
- arXiv, 2019.
-
Abstract
- This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO$_{3}$) MEMS resonator array up to 500��C in air. After a high-temperature burn-in treatment, device quality factor (Q) is enhanced to 508 and the resonance shifts to a lower frequency and remains stable up to 500��C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array are 87.36 MHz and 87.21 MHz at 25��C and 84.56 MHz and 84.39 MHz at 500��C, correspondingly, representing a -3% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returns to 87.36 MHz, demonstrating recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) are found to be -95.27 ppm/��C and 57.5 ppb/��C$^{2}$ for resonant mode A, and -95.43 ppm/��C and 55.8 ppb/��C$^{2}$ for resonant mode B, respectively. The temperature-dependent quality factor (Q) and electromechanical coupling coefficient ($k_{t}^{2}$) are extracted and reported. Device Q decreases to 334 after high-temperature exposure, while $k_{t}^{2}$ increases to 12.40%. This work supports the use of piezoelectric LiNbO$_{3}$ as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g. temperature and infrared).
- Subjects :
- FOS: Physical sciences
Applied Physics (physics.app-ph)
Subjects
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........6cf25ac88a34e0a3a42bcbbd9482e05e
- Full Text :
- https://doi.org/10.48550/arxiv.1911.10276