Back to Search
Start Over
Charge transport in thin interpoly nitride/oxide stacked films
- Source :
- Journal of Applied Physics. 86:2751-2758
- Publication Year :
- 1999
- Publisher :
- AIP Publishing, 1999.
-
Abstract
- In this work, charge transport through interpoly thin nitride/oxide stacked films, including nitride/oxide dual- and oxide/nitride/oxide tri-layer films, was studied. Extensive experimental results, concerning current conduction in single oxide layer, single nitride layer, nitride/oxide dual-layer, and oxide/nitride/oxide tri-layer films are presented. An effective investigation of the various mechanisms that can explain current conduction and charge trapping in these dielectrics was performed. To this aim, different approaches to transport modeling, namely, a classical current continuity model, a transmission model, and a two-step trap assisted model are proposed. The gains and trade offs offered by each model are pointed out. A comprehensive model for the conduction mechanisms in thin nitride/oxide stacked films is proposed.
- Subjects :
- Materials science
business.industry
Inorganic chemistry
Oxide
General Physics and Astronomy
Equivalent oxide thickness
Dielectric
Nitride
Thermal conduction
chemistry.chemical_compound
chemistry
Electrical resistivity and conductivity
Optoelectronics
business
Layer (electronics)
Graphene oxide paper
Subjects
Details
- ISSN :
- 10897550 and 00218979
- Volume :
- 86
- Database :
- OpenAIRE
- Journal :
- Journal of Applied Physics
- Accession number :
- edsair.doi...........6cdafd2ffaa5f984aa0246ec2e1e7412