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1306 Influence of Ozone Microbubble Flow on Photoresist stripping

Authors :
Tetsuya Kanagawa
Yutaka Abe
Masatoshi Ike
Yoshihiro Arai
Ken Fujimori
Akiko Kaneko
Source :
The Proceedings of the Fluids engineering conference. 2014:1306-1
Publication Year :
2014
Publisher :
Japan Society of Mechanical Engineers, 2014.

Subjects

Subjects :
chemistry.chemical_compound
Ozone
Materials science
chemistry
Chemical engineering
Flow (psychology)
Photoresist
Stripping (fiber)

Details

ISSN :
24242896
Volume :
2014
Database :
OpenAIRE
Journal :
The Proceedings of the Fluids engineering conference
Accession number :
edsair.doi...........6cd812507a33fe348c3b4c675bf8d1b8
Full Text :
https://doi.org/10.1299/jsmefed.2014._1306-1_
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