Computerization of contact white light interferometers for linear measurements with submicrometer resolution

The development of the computerized contact white light interferometer is considered. The interferometer is designed for calibration of the standard reference end gauges and other objects in linear range 0,1-100 mm with resolution 0,01 mkm. The salient features of digital processing of the interference images are presented, including architecture of frame grabber and corresponding software. The computerization is in full agreement with the standardized procedures of calibration, increases the accuracy and productivity of measurement, extends their functional opportunities.© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.