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Investigation of nanostructures properties' synthesized by no-current modification of monocrystal silicon
- Source :
- 2010 International Conference on Actual Problems of Electron Devices Engineering.
- Publication Year :
- 2010
- Publisher :
- IEEE, 2010.
-
Abstract
- This article deals with investigation of nanostructures properties' synthesized by no-current modification of monocrystal silicon.
Details
- Database :
- OpenAIRE
- Journal :
- 2010 International Conference on Actual Problems of Electron Devices Engineering
- Accession number :
- edsair.doi...........6b9e7525e49247c0e0af118777862f19
- Full Text :
- https://doi.org/10.1109/apede.2010.5624037