Influence of the oxygen consumption on the crystalline structure of titanium oxides thin films prepared by DC reactive magnetron sputtering

Authors :: Rodrigo Espinoza-González
Judit G. Lisoni
Roberto Villarroel
Guillermo González-Moraga
Source :: Vacuum. 154:52-57
Publication Year :: 2018
Publisher :: Elsevier BV, 2018.
Abstract: This work was supported by the National Commission for Scientific and Technological Research through the FONDECYT grants 1150652 (RE) and 1171803 (GG), FONDEQUIP grant EQ M140142 (GG) and National Doctoral scholarship 21151515 (RV).

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