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Carbon nanotubes/nanofibers for microwave amplifiers and parallel e-beam lithography
- Source :
- IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479).
- Publication Year :
- 2003
- Publisher :
- IEEE, 2003.
-
Abstract
- In this paper, carbon nanotubes/nanofibers for microwave amplifiers and parallel e-beam lithography have been discussed. Field emission properties of CN arrays will be presented.
- Subjects :
- Materials science
Microwave amplifiers
Physics::Optics
Nanotechnology
Astrophysics::Cosmology and Extragalactic Astrophysics
Carbon nanotube
Condensed Matter::Mesoscopic Systems and Quantum Hall Effect
law.invention
Optical properties of carbon nanotubes
Condensed Matter::Materials Science
Field electron emission
Potential applications of carbon nanotubes
law
Nanofiber
Lithography
Electron-beam lithography
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479)
- Accession number :
- edsair.doi...........6a5ab6e22a436cedcac53ecdc0af664e
- Full Text :
- https://doi.org/10.1109/ivmc.2003.1222989