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Cost-effective and high frequency surface acoustic wave filters on ZnO:Fe/Si for low-loss and wideband application

Authors :
Feng Pan
Jingting Luo
Fei Zeng
Ping Fan
Guangxing Liang
Zhuanghao Zheng
Dongping Zhang
Source :
Applied Physics Letters. 101:172909
Publication Year :
2012
Publisher :
AIP Publishing, 2012.

Abstract

ZnO:Fe films with various piezoelectric coefficient d33 were employed to fabricate high frequency surface acoustic wave (SAW) filters on Si by conventional photolithography technology. Comparing with the SAW filters on undoped ZnO films, the electromechanical coupling factor and bandwidth, respectively, increases 75.7% and 14.8%, while the insertion loss decreases 20.3% when using Zn0.988Fe0.012O films with a d33 of ∼127 pC/N. Through annealing demonstration, d33 is considered as the intrinsic factor determining the SAW properties of filters, and the properties are improved by O2 annealing. ZnO:Fe films with enhanced d33 is promising for high frequency, low-loss, and wideband SAW applications.

Details

ISSN :
10773118 and 00036951
Volume :
101
Database :
OpenAIRE
Journal :
Applied Physics Letters
Accession number :
edsair.doi...........6a3b282ccead3f62144c3e89d6e07848