WDM integrated silicon nano-slab photodetector for short-reach datacom on silicon nitride-on-SOI platform

We demonstrate 1X6 SiN echelle grating filters integrated with silicon nano-slab metal-semiconductor-metal photodetector for SWDM based short-reach interconnect. Echelle grating measures 4.3 dB insertion loss and 22 dB crosstalk. Photodetector records 0.59 A/W responsivity.