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Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy
- Source :
- SPIE Proceedings.
- Publication Year :
- 2004
- Publisher :
- SPIE, 2004.
-
Abstract
- We report on characterization techniques for microstructures using white-light interference microscopy. Capabilities include surface profilometry, integrated profilometry and lateral metrology for full 3D characterization, defect detection, profilometry of thin film structures, stroboscopic interferometry of vibrating samples, and real-time profile snapshots of moving MEMS devices.
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- SPIE Proceedings
- Accession number :
- edsair.doi...........67ef23e5b8796a07b79e322f2df76095