4.3: Transparent ZnO Thin Film Transistor Array for the Application of Transparent AM-OLED Display

We have fabricated 2.15 inch AM-OLED panel composed of 176 × 144 (106 dpi) transparent pixels driven by ZnO-TFT. Transparent ZnO thin film deposited by means of atomic layer deposition at 100°C was used for the active channel. The ZnO TFT had a mobility of 1.13cm2/V.s, a threshold voltage of 0.8V, and an on/off ratio of 106. The fabrication of the ZnO TFT array for AM-OLED display has been carried out with four-mask process. and the integration of the ZnO TFT array and the transparent OLED consisted of a transparent anode and cathode and organic layers led to really transparent display.