High-Resolution Measurement of Ultra-Shallow Structures by Scanning Spreading Resistance Microscopy

MLA

Kazuya Ohuchi, et al. “High-Resolution Measurement of Ultra-Shallow Structures by Scanning Spreading Resistance Microscopy.” Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials, Jan. 2006. EBSCOhost, https://doi.org/10.7567/ssdm.2006.a-1-3.

APA

Kazuya Ohuchi, Akira Nishiyama, Mitsuhiro Tomita, Li Zhang, Mariko Takayanagi, Kazunari Ishimaru, & K. Adachi. (2006). High-Resolution Measurement of Ultra-Shallow Structures by Scanning Spreading Resistance Microscopy. Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials. https://doi.org/10.7567/ssdm.2006.a-1-3

Chicago

Kazuya Ohuchi, Akira Nishiyama, Mitsuhiro Tomita, Li Zhang, Mariko Takayanagi, Kazunari Ishimaru, and K. Adachi. 2006. “High-Resolution Measurement of Ultra-Shallow Structures by Scanning Spreading Resistance Microscopy.” Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials, January. doi:10.7567/ssdm.2006.a-1-3.