Back to Search
Start Over
High-Resolution Measurement of Ultra-Shallow Structures by Scanning Spreading Resistance Microscopy
- Source :
- Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials.
- Publication Year :
- 2006
- Publisher :
- The Japan Society of Applied Physics, 2006.
Details
- Database :
- OpenAIRE
- Journal :
- Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials
- Accession number :
- edsair.doi...........67ac43f03b36fec104a55076ba213d64
- Full Text :
- https://doi.org/10.7567/ssdm.2006.a-1-3