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Chromatic monitoring of plasma and plasma systems
- Source :
- Vacuum. 58:88-99
- Publication Year :
- 2000
- Publisher :
- Elsevier BV, 2000.
-
Abstract
- Chromatic systems were originally developed for monitoring the optical emissions of plasma. This contribution describes how the technology has been utilised on low- and high-pressure plasma systems. The speed of operation of chromatic systems has allowed their use in the monitoring of fast changing plasma, such as arcs and laser plumes. The chromatic methodology has now been extended from the optical domain and is used for more general signal processing. This more general application of the chromatic method is outlined and is related to the plasma processing industry.
- Subjects :
- Signal processing
Mathematics::Combinatorics
business.industry
Chemistry
Plasma
Condensed Matter Physics
Laser
Surfaces, Coatings and Films
Domain (software engineering)
law.invention
Optics
Computer Science::Discrete Mathematics
Physics::Plasma Physics
law
Chromatic scale
business
Instrumentation
Plasma processing
Subjects
Details
- ISSN :
- 0042207X
- Volume :
- 58
- Database :
- OpenAIRE
- Journal :
- Vacuum
- Accession number :
- edsair.doi...........66962bd77964b704309c50feb9f223dd
- Full Text :
- https://doi.org/10.1016/s0042-207x(00)00159-7