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Optical near fields for ablation of periodic structures

Authors :
Yi-Shi Xu
Zhen-Ze Li
Hua Fan
Yue-Feng Liu
Hong Xia
Saulius Juodkazis
Qi-Dai Chen
Lei Wang
Source :
Optics Letters. 48:2841
Publication Year :
2023
Publisher :
Optica Publishing Group, 2023.

Abstract

The formation mechanism of laser-induced periodic surface structures (LIPSS) has been a key to high-resolution sub-diffraction lithography or high-efficiency large-area nanotexturing. We show the evolution of LIPSS formation from a nanohole seed structure to high-spatial-frequency LIPSS by using a tightly focused and rectangular-shaped laser beam with different shape–polarization orientations. Formation of LIPSS based on light intensity distribution without invoking any long-range electromagnetic modes achieved quantitative match between modeling and experiment. Our results clearly show the entire step-like and deterministic process of LIPSS evolution based on experimental data and numerical simulations, revealing the dominant structural near-field enhancement on the ripple formation. A rectangular-shaped beam with an aspect ratio of 7:3 was used to break the symmetry of a circularly shaped focus. By azimuthally rotating the orientation of the focal spot and the polarization, it is possible to visualize the far-field effect for the initial seed structure formation and the competition between the far and near fields in the subsequent structure evolution.

Details

ISSN :
15394794 and 01469592
Volume :
48
Database :
OpenAIRE
Journal :
Optics Letters
Accession number :
edsair.doi...........666dc0edaca0823e4d678c33e9a5a630
Full Text :
https://doi.org/10.1364/ol.487323