Device layer transferred poly-Si TFT array for high resolution liquid crystal projector

An active-matrix liquid-crystal light valve (LCLV) for a high-resolution projector, using device layer transfer technology, is proposed. This LCLV will not require high-density interconnection between bus lines and Si IC drivers. To confirm the validity of this proposal, a high-performance poly-Si TFT (thin-film transistor) array with 480*768 pixels in 80 mm diagonal has been fabricated on an oxidized Si wafer. This TFT has a triple-gate structure for obtaining a high on/off current ratio and buried-isolated-pixel-electrode (BIP) structure and ITO barrier metal for reducing defects. This TFT array was transferred onto transparent glass substrate using device layer transfer technology, and the liquid-crystal projector was successfully realized. >