Growth optimization for self-catalyzed GaAs-based nanowires on metal-induced crystallized amorphous substrate

The growth of monocrystalline semiconductor nanowires on arbitrary substrates via the metal-induced crystallization (MIC) process extends the possible combinations of substrates and epitaxial active materials. However, it is still difficult to accomplish high-density vertical nanowire growth on the MIC polycrystalline Si(111) substrate. Here, the authors report on the growth of self-catalyzed GaAs nanowires by molecular beam epitaxy on MIC polycrystalline Si(111) substrates with different surface oxide conditions. Forming the surface oxide by annealing the freshly hydrofluoric acid-etched MIC polycrystalline Si(111) substrate in an ambient atmosphere is found to be a key step to grow high-density GaAs nanowires. Moreover, the addition of Sb during nanowire growth improves the density of vertical nanowires. Photoluminescence measurements reveal a high optical quality of the GaAs nanowires, indicating that the nanowires grown on MIC polycrystalline Si(111) substrate may be used as building blocks for semico...