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Indium phosphide crystal growth from phosphorus-rich melt

Authors :
Zhihong Yao
Weilian Guo
Jiande Fu
Ming Hu
Yanjun Zhao
Xiawan Wu
Luhong Mao
Bin Liao
Xiaolong Zhou
Kewu Yang
Mi Xiao
Niefeng Sun
Tongnian Sun
Lingxia Li
Guangyao Yang
Source :
16th IPRM. 2004 International Conference on Indium Phosphide and Related Materials, 2004..
Publication Year :
2005
Publisher :
IEEE, 2005.

Abstract

P-rich of InP crystals are rather difficult to achieve, due to the high phosphorus pressure at the melting point. By using the P-injection in-situ synthesis method, there is excessive phosphorus in the melt. In the conditions of M/sub In/ [In]/sub mol/, the melt might be P-rich. Since a high thermal stress exists in the LEC growth process with large temperature gradient, it is difficult to release stress, a large number of dislocations come into being around the pores. The pores are distributed in the ingots irregularly. The diameter of the pores is from

Details

Database :
OpenAIRE
Journal :
16th IPRM. 2004 International Conference on Indium Phosphide and Related Materials, 2004.
Accession number :
edsair.doi...........63e56321b3cbb76b8bc9fb3b2b19209e
Full Text :
https://doi.org/10.1109/iciprm.2004.1442721