Improvement of laser damage thresholds of fused silica by ultrasonic-assisted hydrofluoric acid etching

Authors :: Xin Ju
Liming Yang
Zhiqiang Wang
Xinshu Zou
Yuan Li
Hongwei Yan
Xiaodong Yuan
Ke Yang
Chunyan Yan
Caizhen Yao
Source :: Chinese Physics B. 26:118104
Publication Year :: 2017
Publisher :: IOP Publishing, 2017.

Subjects :: Materials science
General Physics and Astronomy
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
010309 optics
chemistry.chemical_compound
Hydrofluoric acid
chemistry
Laser damage
Etching (microfabrication)
0103 physical sciences
Ultrasonic assisted
Composite material
0210 nano-technology

Tools