Measurement of deuterium and helium by glow-discharge optical emission spectroscopy for plasma–surface interaction studies

To examine the resolution of isotope analysis of hydrogen with glow-discharge optical emission spectroscopy (GDOES), depth profiles of hydrogen and deuterium in a H-containing Ta/D-containing Ti/Ni layered structure were measured. The depth profiles of deuterium could be measured with sufficient resolution in the presence of relatively large amounts of hydrogen and vice versa . In addition, measurements of depth profiles of He implanted in W at room temperature were also performed with Ne plasma. The intensity of the He emissions was sufficiently high at a fluence of 10 20 He m −2 or higher. The depth profiles of He measured in this manner were in good agreement with the results of cross-sectional observations using a transmission electron microscope. Therefore, it was concluded that GDOES with Ne plasma is a promising technique for the depth profile analysis of plasma-facing materials and deposited layers formed on them.