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Modification of the surface of materials by boron ions based on discharge systems of vacuum arc and planar magnetron

Authors :
A.S. Bugaev
Source :
Izvestiya vysshikh uchebnykh zavedenii. Fizika. :166-173
Publication Year :
2020
Publisher :
Tomsk State University, 2020.

Subjects

Subjects :
Surface (mathematics)
Materials science
chemistry
Analytical chemistry
chemistry.chemical_element
Vacuum arc
Geotechnical Engineering and Engineering Geology
Boron
Planar magnetron
Ion

Details

ISSN :
00213411
Database :
OpenAIRE
Journal :
Izvestiya vysshikh uchebnykh zavedenii. Fizika
Accession number :
edsair.doi...........62936a6ae694db0e149a09b4aa71d105
Full Text :
https://doi.org/10.17223/00213411/63/10/166
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