76‐2: Fine Glass Masks (FGMs) for OLED Manufacturing Made by Laser Induced Deep Etching (LIDE)

Subjects

Subjects :

Materials science
AMOLED
Etching (microfabrication)
law
business.industry
OLED
Optoelectronics
Laser
business
law.invention

Details

ISSN :

21680159 and 0097966X

Volume :

50

Database :

OpenAIRE

Journal :

SID Symposium Digest of Technical Papers

Accession number :

edsair.doi...........62625a5233b4b9a04c6c8b4974743c91