TopoMEMS Circuit: Step-Variable-Resettable MEMS Capacitor for Topological Electrical Circuit

Recently, emulation of topological states based on electrical circuits draws much attention in view of future quantum computing. We have demonstrated a topological phase transition by switching a step-variable-resettable SOI-MEMS capacitor for the first time. The circuit shows significantly different responses for the topological and trivial phases of the Su-Schrieffer-Heeger (SSH) model by switching the capacitance. We have fabricated a mechanical latching structure integrated with comb capacitors to realize such a MEMS variable capacitance. Our device will open a new field called “topological MEMS (TopoMEMS) circuit”.