Second derivative Langmuir probe diagnostics of gas discharge plasma at intermediate pressures (review article)

The second-derivative Langmuir probe method for precise determination of the plasma potential, the electron energy distribution function (respectively the electron temperature,) and the electron density of gas discharge plasma at intermediate pressures (100-1000 Pa) is reviewed. Results of applying the procedure proposed to different kinds of gas discharges are presented. Factors affecting the accuracy of the plasma characteristics evaluated are discussed.