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Shallow junctions in p-In.53Ga.47As by ion implantation

Authors :
Germán González-Díaz
Jacobo Santamaria
E. Redondo
Carlos León
M. N. Blanco
Source :
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 147:166-170
Publication Year :
1999
Publisher :
Elsevier BV, 1999.

Abstract

In this paper, we present results of current–voltage and admittance spectroscopy measurements on n + p junctions made by Si implantation into Zn doped In .53 Ga .47 As. The I–V characteristics show that the main conduction mechanisms at forward bias is recombination in the space-charge zone, whereas a thermally-activated tunneling dominates the reverse characteristics at low bias and trap-assisted tunneling at medium and high bias. The use of Kramers–Kronig transforms on the admittance spectroscopy data allow us to detect a deep level at 0.36 eV, probably ascribed to thermally activated Zn acceptor dopants in p-In .53 Ga .47 As.

Details

ISSN :
0168583X
Volume :
147
Database :
OpenAIRE
Journal :
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Accession number :
edsair.doi...........61d54de3dfe8002f9c37eb799f59113d
Full Text :
https://doi.org/10.1016/s0168-583x(98)00606-5