Experimental Proof of the Slow Light-Induced Degradation Component in Compensated n-Type Silicon

We present new experimental data on light-induced degradation due to the boron oxygen defect in compensatedn-type silicon. We are the first to show that both defect components known fromp-type silicon are formed in compensatedn-type silicon. A parameterization of the injection dependent recombination activity of the slower formed defect component is established. The formation kinetics of both defect components are studied and modeled under different conditions. It is found that the same rate factors as inp-type can describe the degradation, if the actual hole concentration under illumination is taken into account. The regeneration process known to permanently deactivate boron oxygen defects inp-type is successfully applied ton-type material and the illumination stability of the regenerated state is tested and proven.