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In-situ Mueller matrix ellipsometry of silicon nanowires grown by plasma-enhanced vapor-liquid-solid method for radial junction solar cells
- Source :
- Applied Surface Science. 421:667-673
- Publication Year :
- 2017
- Publisher :
- Elsevier BV, 2017.
-
Abstract
- In-situ Mueller matrix spectroscopic ellipsometry was applied for monitoring the silicon nanowire growth by plasma-enhanced vapor-liquid-solid method. The technique is proposed as a real-time, non-destructive, and non-invasive characterization of the deposition process in a plasma-enhanced chemical vapor deposition reactor. The data have been taken by spectrally resolved Mueller matrix ellipsometer every 1 min during the 8–10 min long nanowire growth process. We have developed an easy-to-apply optical model to fit the experimental data, which enables to study the evolution of the parameters of the structure during initial stages of the growth. The first results provide information about the effective deposition rate determined from the linear increase of the deposited silicon volume with the deposition time.
- Subjects :
- Materials science
Silicon
technology, industry, and agriculture
Analytical chemistry
Nanowire
General Physics and Astronomy
chemistry.chemical_element
02 engineering and technology
Surfaces and Interfaces
General Chemistry
Plasma
Chemical vapor deposition
equipment and supplies
010402 general chemistry
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
0104 chemical sciences
Surfaces, Coatings and Films
chemistry
Ellipsometry
Deposition (phase transition)
Mueller calculus
Vapor–liquid–solid method
0210 nano-technology
Subjects
Details
- ISSN :
- 01694332
- Volume :
- 421
- Database :
- OpenAIRE
- Journal :
- Applied Surface Science
- Accession number :
- edsair.doi...........6130b73b56f2355c4a092cf56d2eac46