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Observation of a localized electron beam in large-area microwave discharge

Authors :
Jozef Kudela
Masashi Kando
Milan Širý
D. Korzec
Tibor Terebessy
Source :
Applied Physics Letters. 82:694-696
Publication Year :
2003
Publisher :
AIP Publishing, 2003.

Abstract

We report on a localized high-density electron beam in large-area microwave discharges in argon. The beam is observed only for certain antenna configurations at gas pressures of about 50 mTorr, and it strongly modifies the radial plasma density profiles. The beam current near the quartz plate is estimated to be ≈140 mA/cm2.

Details

ISSN :
10773118 and 00036951
Volume :
82
Database :
OpenAIRE
Journal :
Applied Physics Letters
Accession number :
edsair.doi...........60c57676780775b633ebdcfd50f22b99