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基于微焦点X射线光栅干涉仪的波前传感与面形测量技术
- Source :
- Acta Optica Sinica. 42:2334002
- Publication Year :
- 2022
- Publisher :
- Shanghai Institute of Optics and Fine Mechanics, 2022.
Details
- ISSN :
- 02532239
- Volume :
- 42
- Database :
- OpenAIRE
- Journal :
- Acta Optica Sinica
- Accession number :
- edsair.doi...........609415cc8df582d99ef0dd828cec746d
- Full Text :
- https://doi.org/10.3788/aos202242.2334002