Decomposition behavior of III/V semiconductor precursor gases in a closed gas cell in-situ TEM holder observed by mass spectrometry

Authors :: Kerstin Volz
David Krug
Maximilian Widemann
Andreas Beyer
Felix Gruber
Source :: Microscopy and Microanalysis. 27:2220-2222
Publication Year :: 2021
Publisher :: Oxford University Press (OUP), 2021.

Subjects :: In situ
Materials science
Semiconductor
business.industry
Analytical chemistry
business
Mass spectrometry
Instrumentation
Decomposition

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