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Miniaturisierter 3D-Tastsensor für die Metrologie an Mikrostrukturen

Authors :
Uwe Brand
Sebastian Bütefisch
T. Kleine-Besten
Α. Schlachetzki
S. Loheide
Stephanus Büttgenbach
Source :
teme. 66:490-495
Publication Year :
1999
Publisher :
Walter de Gruyter GmbH, 1999.

Subjects

Subjects :
Physics
Electrical and Electronic Engineering
Instrumentation

Details

ISSN :
21967113 and 01718096
Volume :
66
Database :
OpenAIRE
Journal :
teme
Accession number :
edsair.doi...........5f7ad4a44ba297da7afb47c823a4164c
Full Text :
https://doi.org/10.1524/teme.1999.66.12.490
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