Target modification in the excimer laser deposition of YBa2Cu3O7−xthin films

Under conditions used for pulsed laser deposition (308 nm, 20 ns, 2–8 J/cm2) of Y‐Ba‐Cu‐O superconducting thin films, we have measured a pronounced decrease in deposition rate with cumulative laser exposure of the target. This decay in rate is accompanied by evolution on the target surface of microscopic columnar structures, having yttrium‐enriched surfaces, which are aligned in the direction of the incident laser beam (45°). Neither the vapor plume direction nor film stoichiometry is affected by the presence of these oriented, chemically altered surface features.