Defect annealing in neutron and ion damaged silicon: Influence of defect clusters and doping

We have explored defect annealing in radiation damaged silicon in a regime characterized by defect clusters and higher doping. Several types of pnp and npn Si bipolar transistors have been irradiated with ions and neutrons, then isochronally annealed from 300 to 600 K to study the evolution of deep level transient spectroscopy (DLTS) defect signatures. Variations in these data with radiation environment, Fermi level, annealing temperature, and doping density have been used to separate the contributions of three dominant defects to the DLTS defect spectra. We find that the normal Si divacancy and a divacancylike defect with similar properties make similar contributions to a DLTS peak normally associated with transitions from the single minus charge state of the divacancy. However the latter defect is clearly associated with the presence of defect clusters. The vacancy-donor center can also contribute to this high temperature DLTS signature, and its relative importance can be quantitatively assessed by vary...