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Advanced Low Temperature Raised S/D Epitaxy Using Cyclic and Poly-Selective Techniques
- Source :
- Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials.
- Publication Year :
- 2009
- Publisher :
- The Japan Society of Applied Physics, 2009.
- Subjects :
- Materials science
business.industry
Optoelectronics
business
Epitaxy
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials
- Accession number :
- edsair.doi...........5ebc4da6f9b1a065a303dbf1f3804f43
- Full Text :
- https://doi.org/10.7567/ssdm.2009.b-6-1