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Development of Low-Residual-Stress Photosensitive Adhesive Materials for Wafer-Scale Microfluidic Device Fabrication

Authors :
Takashi Doi
Isao Nishimura
Masahiro Kaneko
Tsutomu Shimokawa
Source :
Journal of Photopolymer Science and Technology. 35:313-319
Publication Year :
2022
Publisher :
Technical Association of Photopolymers, Japan, 2022.

Details

ISSN :
13496336 and 09149244
Volume :
35
Database :
OpenAIRE
Journal :
Journal of Photopolymer Science and Technology
Accession number :
edsair.doi...........5e6f4c3ddccfc311317a952fdceade00
Full Text :
https://doi.org/10.2494/photopolymer.35.313