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Correlation between structural and optical properties of a-plane GaN films grown on r-plane sapphire by metal organic chemical-vapor deposition
- Source :
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 28:623-626
- Publication Year :
- 2010
- Publisher :
- American Vacuum Society, 2010.
-
Abstract
- The authors have studied the photoluminescence (PL) intensities of a-plane (11-20) GaN films (a-GaN) as a function of x-ray rocking-curve (XRC) linewidth values measured in both c- and m-axis directions. PL intensity of well-known luminescence lines such as 3.47 eV (bound exciton emission), 3.41 eV (basal-plane stacking fault related emission), and 3.29 eV (defect induced emission) are discussed in terms of XRC linewidth values. PL intensities reveal a close relationship with XRC linewidth measured in the c-axis direction, while an unusual relationship was observed between PL intensity and XRC linewidth in the m-axis direction. Inhomogeneous strain along the m-axis direction of a-GaN film is discussed as a cause of XRC linewidth broadening, rather than the formation of structural defects.
- Subjects :
- Materials science
Photoluminescence
business.industry
Process Chemistry and Technology
Exciton
Chemical vapor deposition
Molecular physics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Laser linewidth
Materials Chemistry
Sapphire
Optoelectronics
Metalorganic vapour phase epitaxy
Electrical and Electronic Engineering
Luminescence
business
Instrumentation
Stacking fault
Subjects
Details
- ISSN :
- 21662754 and 21662746
- Volume :
- 28
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- Accession number :
- edsair.doi...........5e513634551d91d57abb61d2d18e2e4d
- Full Text :
- https://doi.org/10.1116/1.3388889