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Correlation between structural and optical properties of a-plane GaN films grown on r-plane sapphire by metal organic chemical-vapor deposition

Authors :
Jiho Chang
Hyunjae Lee
Gyung-Suk Kil
Jun-Seok Ha
Seogwoo Lee
Yong-gon Seo
Sungmin Whang
Seungwhan Park
Myungwhan Cho
Takafumi Yao
Jinsub Park
Mina Jung
Katsushi Fujii
Source :
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 28:623-626
Publication Year :
2010
Publisher :
American Vacuum Society, 2010.

Abstract

The authors have studied the photoluminescence (PL) intensities of a-plane (11-20) GaN films (a-GaN) as a function of x-ray rocking-curve (XRC) linewidth values measured in both c- and m-axis directions. PL intensity of well-known luminescence lines such as 3.47 eV (bound exciton emission), 3.41 eV (basal-plane stacking fault related emission), and 3.29 eV (defect induced emission) are discussed in terms of XRC linewidth values. PL intensities reveal a close relationship with XRC linewidth measured in the c-axis direction, while an unusual relationship was observed between PL intensity and XRC linewidth in the m-axis direction. Inhomogeneous strain along the m-axis direction of a-GaN film is discussed as a cause of XRC linewidth broadening, rather than the formation of structural defects.

Details

ISSN :
21662754 and 21662746
Volume :
28
Database :
OpenAIRE
Journal :
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Accession number :
edsair.doi...........5e513634551d91d57abb61d2d18e2e4d
Full Text :
https://doi.org/10.1116/1.3388889