Influence of grain size of Cu target on its magnetron sputtering erosion and parameters

MLA

Wen-hao Yang, et al. “Influence of Grain Size of Cu Target on Its Magnetron Sputtering Erosion and Parameters.” Journal of Materials Science: Materials in Electronics, vol. 32, July 2021, pp. 26181–88. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........5df251474abdeb2c9e00814eb338e661&authtype=sso&custid=ns315887.

APA

Wen-hao Yang, Duo Wang, Shuaikang Wang, Yupeng Wang, Guo-hua Zhao, Yao Lijun, Bin Tang, Xueze Wang, Shangsong Zhan, & Mingdong Bao. (2021). Influence of grain size of Cu target on its magnetron sputtering erosion and parameters. Journal of Materials Science: Materials in Electronics, 32, 26181–26188.

Chicago

Wen-hao Yang, Duo Wang, Shuaikang Wang, Yupeng Wang, Guo-hua Zhao, Yao Lijun, Bin Tang, Xueze Wang, Shangsong Zhan, and Mingdong Bao. 2021. “Influence of Grain Size of Cu Target on Its Magnetron Sputtering Erosion and Parameters.” Journal of Materials Science: Materials in Electronics 32 (July): 26181–88. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........5df251474abdeb2c9e00814eb338e661&authtype=sso&custid=ns315887.