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Design and validation of the control circuits for a micro-cantilever tool for a micro-robot
- Source :
- Sensors and Actuators A: Physical. 153:76-83
- Publication Year :
- 2009
- Publisher :
- Elsevier BV, 2009.
-
Abstract
- The objective of this paper is to present the design and validation of a cantilever-based contact sensing system for a micro-robot. Key elements of the fabrication process of the sensor and the ele ...
- Subjects :
- Engineering
Fabrication
Cantilever
business.industry
Metals and Alloys
Process (computing)
Condensed Matter Physics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Interface circuits
Electronic engineering
Key (cryptography)
Robot
Electrical and Electronic Engineering
business
Instrumentation
Sensing system
Electronic circuit
Subjects
Details
- ISSN :
- 09244247
- Volume :
- 153
- Database :
- OpenAIRE
- Journal :
- Sensors and Actuators A: Physical
- Accession number :
- edsair.doi...........5daf10cb5080a2d6db9379888a20edba