ArF-resist line width slimming variation with threshold level in high precision CD-SEM measurement

MLA

Hiroki Kawada, and Yuki Ojima. “ArF-Resist Line Width Slimming Variation with Threshold Level in High Precision CD-SEM Measurement.” SPIE Proceedings, May 2005. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........5da8756783a0d4464c5ce320a1e1d4cf&authtype=sso&custid=ns315887.

APA

Hiroki Kawada, & Yuki Ojima. (2005). ArF-resist line width slimming variation with threshold level in high precision CD-SEM measurement. SPIE Proceedings.

Chicago

Hiroki Kawada, and Yuki Ojima. 2005. “ArF-Resist Line Width Slimming Variation with Threshold Level in High Precision CD-SEM Measurement.” SPIE Proceedings, May. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........5da8756783a0d4464c5ce320a1e1d4cf&authtype=sso&custid=ns315887.