Back to Search
Start Over
Mechanical Stress in SiNx Films Grown by High Density Plasma Enhanced Chemical Vapor Deposition
- Source :
- Inorganic Materials. 58:906-911
- Publication Year :
- 2022
- Publisher :
- Pleiades Publishing Ltd, 2022.
Details
- ISSN :
- 16083172 and 00201685
- Volume :
- 58
- Database :
- OpenAIRE
- Journal :
- Inorganic Materials
- Accession number :
- edsair.doi...........5d9d95bb04599aaa58b8762c9e4f1701