Geometric Error Modeling and Compensation of the Dual-driving Feed Worktable

The dual-driving feed worktable (DDFW) is increasingly used in feed systems with high precision and dynamic performance requirements, while its geometric error, caused by the factors such as manufacturing, assembly errors and the deformation, is the main factor affecting positioning accuracy. The research on geometric error compensation of DDFW is significant. In this paper, geometric error analysis and compensation of DDFW, equipped with the open CNC system of BECKHOFF, are conducted. Firstly, the geometric error model of DDFW is established, and the geometric errors are measured by using dual-frequency laser interferometer. Then the electronic cam combined with virtual axis compensation algorithm is designed. Finally, the compensation experiment is completed, and the results show that the positioning precision of DDFW improves a lot with the proposed compensation strategy.