Indium tin oxide etch characteristics using CxH2x+2(x=1,2,3)/Ar

Subjects

Subjects :

Mechanics of Materials
Mechanical Engineering
General Materials Science
Condensed Matter Physics

Details

ISSN :

13698001

Volume :

160

Database :

OpenAIRE

Journal :

Materials Science in Semiconductor Processing

Accession number :

edsair.doi...........5d0c2df41cf2a093f1c6dc6421cabb41

Full Text :

https://doi.org/10.1016/j.mssp.2023.107395