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Growth of high-quality single-walled carbon nanotubes through the thermal chemical vapor deposition using co-sputtering Fe–Mo films as catalysts
- Source :
- Surface and Coatings Technology. 200:3199-3202
- Publication Year :
- 2006
- Publisher :
- Elsevier BV, 2006.
-
Abstract
- Synthesis of high-quality and high purity single-walled carbon nanotubes (SWNTs) on the Fe–Mo catalysts in the thermal chemical vapor deposition (CVD) process was performed. The catalysts were prepared by the co-sputtering and the multilayer pre-coating methods. Acetylene was adopted as the carbon precursor, and Fe and Mo were used as the raw materials of catalyst. Fe and Mo were co-sputtered or sputtered separately onto an Al layer, which was pre-coated onto a SiO 2 substrate. After heat treatment, Fe–Mo catalytic particles with nano-size were formed on the substrate for growing SWNTs. The diameter distribution and microstructure of the SWNTs synthesized using these methods were investigated. Morphologies of the synthesized SWNTs were examined by field emission scanning electron microscope (FESEM) and the microstructure was studied using Raman scattering spectrometer and high resolution transmission electron microscope (HRTEM). Peaks of the radial breathing mode (RBM) in the Raman spectrum demonstrate that highly pure SWNTs had been synthesized when the co-sputtered Fe–Mo catalysts were used.
- Subjects :
- Materials science
Analytical chemistry
Surfaces and Interfaces
General Chemistry
Carbon nanotube
Chemical vapor deposition
Condensed Matter Physics
Microstructure
Surfaces, Coatings and Films
law.invention
Field emission microscopy
symbols.namesake
Sputtering
Transmission electron microscopy
law
Materials Chemistry
symbols
High-resolution transmission electron microscopy
Raman spectroscopy
Subjects
Details
- ISSN :
- 02578972
- Volume :
- 200
- Database :
- OpenAIRE
- Journal :
- Surface and Coatings Technology
- Accession number :
- edsair.doi...........5d07a66e0e6205e0537f86ecd267a537