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Whole field optical detection method of strain distribution of SU-8 photoresist
- Source :
- Chinese Optics. 9:379-384
- Publication Year :
- 2016
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2016.
Details
- ISSN :
- 20951531
- Volume :
- 9
- Database :
- OpenAIRE
- Journal :
- Chinese Optics
- Accession number :
- edsair.doi...........5cd14f38a5c30d661b14260166363763